CVD (Chemical Vapor Deposition) heater

Sun, 28 Jun 2026 05:59:46 +0800

On the fab floor, a 0.5°C drift in chamber temperature is the kind of thing that quietly eats yield. We built this CVD heater for the reality that every run comes down to angstroms and degrees. What matters, technically It pairs short-wave infrared heating with a quartz-encapsulated element, so wafer-level uniformity lands within ±0.1°C. Temperature settles in under 10 seconds, and repeatability holds within ±0.2°C across thousands of cycles. Cleanroom compatibility isn’t an afterthought. Low-outgassing materials, Class 1–100 compliant construction, and a surface finish that keeps particle counts flat are baked into the design. Zero particle generation isn’t a slogan—it’s a constraint, verified with in-situ monitoring. Why it holds up in production In CVD, thermal stability drives film thickness, stress, and defect density. This heater keeps the thermal budget tight, so deposition recipes run consistent instead of chasing drift. Fast response cuts idle time between lots, and the stable setpoint helps the steps around it—especially the photoresist bakes. Soft bake and hard bake profiles stay within spec, which means fewer reworks. Energy use drops because heat comes on demand with minimal overshoot. And it’s built to run 24/7 without unplanned downtime. What you need to get right Installation has to nail alignment into the chamber hot zone, plus compatible RF/EMI shielding. Get that wrong, and you can end up with micro-nonuniformities that show up later. Expect a short commissioning window to tune the PID constants to your chamber mass and gas flow profile. Once those are dialed, the heater is predictable—but treat the thermal interface as part of the process, not an accessory.

Vapor on Quartz Infrared Heating Source

CVD (Chemical Vapor Deposition) heater