http://quartz-ir-heat.com/zh/tags/%E6%9B%BF%E6%8D%A2/ Recent content in 替换 on Quartz Infrared Heating Source Hugo zh Tue, 09 Jun 2026 03:49:46 +0800 http://quartz-ir-heat.com/zh/posts/mattson-rtp-lamp-replacement/ Tue, 09 Jun 2026 03:49:46 +0800 http://quartz-ir-heat.com/zh/posts/mattson-rtp-lamp-replacement/ <p><img src="http://quartz-ir-heat.com/images/e359da41a435291bc4b653b358552252.png" alt="Mattson RTP灯更换"></p> <p>在制造车间，一个RTP工具中的灯管故障不仅仅是停掉一个腔室—它会导致整条生产线停滞。在光刻胶的软烘焙和硬烘焙过程中，温度漂移会使关键尺寸偏离目标，而晶圆上的非均匀加热使得可重复性变得不确定。Mattson RTP灯管更换设计旨在将热控制保持在所需位置：在工艺窗口内。</p>